Reduction of spurious resonance peaks in microcantilever tuning through substrate contact surface reduction

The tuning capabilities of otherwise similar tapping mode atomic force microscope (AFM) cantilever probes, for use in air, can be improved by patterning the backside of the respective probe substrate. Three designs were tested and rated against a standard unpatterned substrate. It was shown that lowering the probe substrate contact surface area decreased the occurrence of spurious resonance peaks and resulted in cleaner tuning curves as compared to probes with higher contact surface areas.