Multisubband electron transport in δ-doped semiconductor systems

The electron transport properties in {δ}-doped semiconductor systems are studied. The subband electronic structure of the {δ}-doped system is obtained by solving the coupled Schr\"odinger and Poisson equations. The screening of the quasi-two-dimensional electron gas is taken into account for the ionized impurity scattering through the matrix dielectric function within the random-phase approximation. The quantum and transport mobilities are calculated numerically as a function of the total electron density and the width of the doped layer at zero temperature. The intersubband scattering and the effect of empty subbands above the Fermi level on the electron mobilities are investigated. The calculated mobilities are in reasonable agreement with the available experimental results.