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Microscale wear properties of ultrathin diamond-like carbon (DLC) films grown by rf plasma-enhanced chemical vapor deposition were investigated using an atomic force microscope. It was revealed that a low wear-resistant layer, which contained a larger s p 2 component, existed on the surface of the films. The thickness of the layer depended on the self-bias voltage during deposition. The intermixing of carbon and silicon atoms at the interface between the DLC and the substrate was found to affect the surface wear resistance of ultrathin DLC films.
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Shimura et al. (2000) studied this question.
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