Characteristics of Cu plasma produced by a laser interaction with a solid target

Characteristics of laser produced Cu plasma were investigated using spectroscopy, a CCD camera, and a Langmuir single probe. A pulsed Nd : YAG laser of 52 mJ, 335 nm, and pulse duration 7 ns was used for generating high density plasma in vacuum and argon buffer gas. Spectroscopic measurements were devoted to determine plasma lifetime, electron temperature T e , plasma velocity V p , and electron density N e . T e was determined using a Boltzmann plot and N e was determined using Stark line broadening. Langmuir single probe was located at 3.5 mm from Cu target to measure T e and N e . The T e values of the probe were coincident with the spatial profile of determined by spectroscopic measurements. Plasma lifetime and the CCD camera image were dependent on the Ar pressure. These plasma parameters improve the laser plasma deposition thin films.