Continuum model for nanocolumn growth during oblique angle deposition

This is the authors' abstract. We don't add key points for this paper.

A continuum equation for the shadowing growth of individual nanostructures by oblique angle deposition is proposed and numerically integrated. The radius R of rotationally symmetric columns is calculated as a function of height z. Before the radius R saturates at its final value Rsat, column shapes obey the power law R∼zp with the exponent value p∼0.37±0.02. The results are compared to those of an experimental study of Si columns grown on a template (p∼0.39±0.03), and on a flat surface (p∼0.32±0.01). The model additionally predicts that the saturated radius should depend on column separation d as Rsat∼d1.20±.01. This relation implies that the gap between the surfaces of adjacent columns can be optimized by altering the column separation.