This letter deals with the electrical and wideband frequency characterizations of metal-insulator-metal capacitors integrating medium-¿ material, ZrO2. In particular, this letter focuses on the frequency effect on the voltage linearity of these capacitors and material. The dependence of the voltage-capacitance coefficient (VCC) ¿ is, for the first time, studied from 1 kHz to 1 GHz. Intrinsic or extrinsic material origin of the VCC are discussed.
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Bertaud et al. (2010) studied this question.
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