A Low-Voltage Torsion Nanorelay

We demonstrate the use of torsion in nanorelays to achieve low voltages, high speeds, single-lithography-step construction, and a form useful for configurability and electronic design enhancements in 3-D integrated implementations. The combined bending and torsion of self-aligned nanopillars facilitates the first top-down fabricated vertical three-terminal nanoscale relay. Experimental devices, even at 500-nm features, operate at ~10 V and 1-3 μs. Scaling to 45 nm suggests operation at approximately 1 V.