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November 1, 1979Journal of Vacuum Science and Technology

Modeling of beam voltage effects in electron-beam annealing

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Authors

ANA. NeukermansSilk Road Medical (United States)WSW. A. SapersteinHewlett-Packard (United States)

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Neukermans et al. (1979) studied this question.

synapsesocial.com/papers/6a968d77a43071aed1f6a910https://doi.org/10.1116/1.570310
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