Increasing the creation yield of shallow single defects in diamond by surface plasma treatment

Single Nitrogen-Vacancy (NV) centers in diamond close to the crystal surface are very promising magnetic field sensors with very high sensitivity. Here, we report the enhanced creation of very shallow (less than 3 nm below the diamond surface) NV centers by using fluorine and oxygen plasma treatment. We observe a four fold increase—from 0.11% to about 0.45% in the production yield when the sample surface is terminated with fluorine or oxygen atoms. This effect is explained by the stabilization of the NV's negative charge state which is influenced by the various defects present on the diamond surface.