Analysis of the transit time effect on the stroboscopic voltage contrast in the scanning electron microscope

The transit time effect (TTE) on stroboscopic waveform measurements in the scanning electron microscope is analysed. Here the TTE means the voltage contrast variation due to the time-varying surface electric field near the measurement electrode. The results show that the TTE on waveform rise and fall times or amplitude measurements cannot be disregarded for waveforms with a time variation of the order of 100 ps or less. The TTE on pulse width measurements does not appear to be so large.