Size and Shape Controlled Growth of Molecular Nanostructures on Silicon Oxide Templates

A new process for nanoscale fabrication of ordered monolayer films of conjugated organic molecules is presented. The process makes it possible to grow sexithiophene monolayers (T6) at precise locations on a silicon substrate with a high degree of order while preserving the orientation of growth. The process is based on the integration of local oxidation nanolithography of the substrate and template growth of the molecular thin film. The former is used to fabricate silicon oxide arrays of parallel lines of 30−50 nm in width and several microns in length. Template growth arises from the interplay between kinetic growth parameters and preferential interactions with the patterned surface. The result is a monolayer film of organic molecules that conformally mimicks the features of the fabricated motives. This approach could be used to connect molecular domains of well-defined size between metallic electrodes.