The TOroidal MAgnetized System (TOMAS) is a simple magnetized torus dedicated to the investigation of wall conditioning methods by microwave-induced plasmas. In the TOMAS facility, an electron cyclotron resonance plasma is produced by microwaves at a frequency of 2.45 GHz and the corresponding resonant magnetic field of 87.6 mT. The facility and the first operational experience of film deposition by means of methane plasmas are described.
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Stork et al. (2001) studied this question.
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