A consistent definition of probe size and spatial resolution in the analytical electron microscope

A technique for measuring the extremely small (<2 nm) probe sizes generated in a field emission gun analytical electron microscope is described. The technique involves scanning the fine probe across the edge of small oriented MgO cubes. A mathematical description of the intensity profiles is developed and it is shown how this relates to various definitions of the probe size. The experimentally measured probe sizes are then combined in a consistent manner with both beam broadening calculations and experimental measurements. This approach results in the first self‐consistent definition of the spatial resolution of X‐ray microanalysis in thin foils.