Ionization gas sensing of the ion flow current in a microtripolar electrode system with carbon nanotubes

We report the tests of a tripolar on-chip microelectrode system with carbon nanotubes, where the ion flow current (Ii) and the partial discharge current produced by the field ionization process of gaseous molecules can be measured to characterize the gas species and concentration. A theoretical account is given regarding the underlying differences between their sensing mechanisms. Further, comparative analysis of these two outputs in response to the concentration dynamic changes of ethanol/acetone in N2 demonstrates the explicit cases of improved sensitivity and selectivity of the Ii measurement.