Laser-induced photolysis of monoorganylsilanes RSiH3(R = H2CCH, HCC, ClHCCH and H2CCHCH2) produces thin Si/C/H films, thought to be saturated polycarbosilanes of low hydrogen content, and formed from unsaturated transients generated upon elimination of hydrogen and ethyne from the RSiH3 molecules. The films incorporate oxygen upon exposure to the atmosphere.
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Pola et al. (1996) studied this question.
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