Thermodynamics of Vapor Synthesis of AlN by Nitridation of Aluminum and Its Halides

A thermodynamic analysis for the vapor synthesis of AlN is presented. A thermodynamic equilibrium computer code and recent thermochemical tables are used to evaluate various reactant gases for their potential to produce high‐purity AlN at high yields. The Al/N/H/X/Y systems are examined, where X is any halide atom and Y is an inert gas. The effects of reactant ratio, temperature, and pressure on reactant conversion and product purity are estimated. Results from two systems are presented in the form of design diagrams, which represent the phases formed and the conversion achieved at various process conditions.