Cold microplasma plume produced by a compact and flexible generator at atmospheric pressure

In this letter, we report a cold microplasma generator at atmospheric pressure excited at 1kHz in a pin to hole-electrode configuration by using soft materials partly. A nitrogen plasma plume with a length of more than 5cm can be produced at low electrical power of 0.7W without high feed gas pressure. The generator exhibits a compact structure with flexible property, which is suitable for treating thermally sensitive materials and biomedical materials, especially for delicate objects in an irregular confined space. Optical emission spectroscopy is used to spatially identify excited species in plasma plume.