A comparative study of three methods for thin film, in-plane residual strain evaluation is presented. Thin films of SrTiO3 and BaxSr(1 - x)TiO3 deposited using pulsed laser deposition on LaAlO3 and MgO substrates were investigated. It is shown that the most precise way to evaluate thin film, in-plane residual strain is by using Grazing Incidence X-ray diffraction.
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Petrov et al. (2004) studied this question.