Resonant piezo-layers (RPLs) manufactured in thick-film technology are proposed as highly sensitive gravimetric sensors. RPLs rely on a PZT-based screen printable paste which is used for the fabrication of planar elements on alumina substrates behaving as thickness-mode resonators. When operated at resonance, these elements are sensitive to a mass load applied on their free moving face, working as resonant microbalances with a frequency output, reaching a mass sensitivity of 114 kHz . This paper describes the paste preparation, background theory, frequency-tracking oscillator and the characterization of the sensors and anticipates their application in sensing arrays for chemical measurements.
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Ferrari et al. (1997) studied this question.
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