Energy distribution of O− ions during reactive magnetron sputtering

Low, medium, and high energy O− ion populations were experimentally detected during magnetron sputtering of Al in an Ar∕O2 atmosphere. Based on calculations, the authors propose that nonsputtered O− ions originating from the target surface are accelerated in the cathode fall, while sputtered O− ions may be excluded as a significant contribution to the high energy ion population. Furthermore, the formation of medium energy O− ions is consistent with the notion of sputtered, in the cathode fall accelerated, and subsequently dissociated AlO− and AlO2− clusters. These findings may be of importance for understanding plasma energetics and growth involving electronegative species.