Growth studies of (2 2 0), (2 0 0) and (1 1 1) oriented MgO films on Si (0 0 1) without buffer layer

Selective growth of single-oriented (2 2 0), (2 0 0) and (1 1 1) MgO films on Si (1 0 0) substrates without buffer layers were obtained with a single crystal MgO target by pulsed laser deposition. All the films are very smooth and free of droplets, especially the surface of (2 2 0) and (2 0 0) oriented MgO films which are atomic-scale smooth. High resolution transmission electron microscopy was used to analyse the interfaces between MgO and Si under various conditions.