8” Uniform Electron Cyclotron Resonance Plasma Source Using a Circular TE01 Mode Microwave, Hidaka, Ryota, Yamaguchi, Toru, Hirotsu, Nobuyoshi, Ohshima, Takaharu, Koga, Ryuji, Tanaka, Masayoshi, Kawai, Yoshinobu
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Hidaka et al. (1993) studied this question.
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