It is shown that the results of lengthy Monte Carlo simulations for positron stopping profiles in multilayer systems can be reproduced accurately in the incident energy range 1–25 keV using a simple scaling model. This model takes into account the variation of mean implantation depth between layers and the backscattering effects of interfaces and represents a computation time saving of several orders of magnitude. This development is a significant step in the effort to make detailed multilayer defect profiling with positrons a practical possibility.
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G. C. Aers (1994) studied this question.