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To make high-responsivity YBa2Cu3O7−x microbolometers with response times in the tens of microseconds, heat capacity and hence physical size must be small. We measured the responsivities and response times of 2.5×2.5 μm and 10×10 μm YBa2Cu3O7−x microbolometers fabricated on ZrO2 substrates and illuminated by an argon-ion laser focused to a 2 μm spot. Responsivities were found to be 975 and 700 V/W, respectively, with response times of 10 and 40 μs.
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Li et al. (1993) studied this question.
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