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In this paper, a high-speed digital valve whose switching speed is within 100 microseconds is developed. Commercially available multilayered piezo devices are used to drive coupled poppet-type valves directly. By introducing a kind of feed forward control and employing some new methods, on-off-type coupled poppet valves with high-speed response to within 100 microseconds of switching speed are successfully developed. The valve is ascertained by experiment to respond and follow a 2kHz rectangular wave input. In addition, in one of its applications, a high-speed, two-stage digital servo valve is developed by using the high-speed digital valves as the first stage. The second-stage spool valve, as a load, is driven by a couple of the first-stage on-off valves.
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YOKOTA et al. (1991) studied this question.
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