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February 22, 2001Plasma Physics and Controlled Fusion

Handbook of Advanced Plasma Processing Techniques

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Authors

JSJ ShulSPS L Pearton

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Shul et al. (2001) studied this question.

synapsesocial.com/papers/6a97e316378ea914c1fadfbfhttps://doi.org/10.1088/0741-3335/43/3/703
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