Electron-beam-induced welding of 3D nano-objects from beneath

Exposure of a sample to the electron beam in a scanning electron microscope (SEM) results in the growth of a film of amorphous carbon due to decomposition of hydrocarbon molecules, which are always present in small quantities in the SEM chamber. This growth is induced mainly by secondary electrons backscattered by atoms of both the sample and substrate. We show that, because the secondary electrons are spread beyond the exposed area, this deposit can be grown in areas of geometric shadow and therefore can be used for bonding of different complex 3D nano-objects to a substrate. This is demonstrated by welding 100 nm Fe–Co–Ni nanoparticles to the surface of 2D graphite. The tip of an atomic force microscope was used to probe the mechanical properties of the formed nanostructures. We observed that, for layers thicker than 25 nm, the nanoparticle is bonded so strongly that it is easier to break the particle than to separate it from the substrate.