EPR Studies of defects in silicon

Electron and neutron irradiated, plastically deformed silicon has been studied by EPR. Irradiation resulted in a strong decrease of the EPR spectra produced by the deformation and in the appearance of a new EPR center at dislocations. Thermal annealing lead to a reestablishment of the formerly present dislocation spectra. As most probable explanation is proposed a change of the dislocation strain field by irradiation induced point defect iclusters. – EPR investigations of iron in boron doped Si demonstrated the pairing of all nterstitial iron in FeB pairs during room temperature storage. Thermal treatment at temperatures higher than 100°C lead to the reappearance of Fe . Therefore the time limiting factor for the annealing of FeB pairs should be the precipitation of interstitial iron.