Novel Transfer Method Using Near-Field Acoustic Levitation and Its Application

The holding of a levitated object above stator vibrators by utilizing the holding force, which is generated by near-field acoustic levitation, is possible. The holding force yields at the edge of a vibration plate and nodes of a bending vibration mode, and it is in proportion to the vibration amplitude of the vibration plate. In this paper, we describe methods of transfer and positioning of a levitated object above many aligned stator vibrators, some experimental results, and the proposition of the application as a noncontact-stepping ultrasonic motor (NCS-USM). Linear-type and rotary-type NCS-USMs can be flexibly constructed. The NCS-USM has a possibility of high torque performance compared with an ordinary noncontact USM using a traveling wave.