Localized Corrosion of Sputtered Aluminum and Al‐0.5% Cu Alloy Thin Films in Aqueous HF Solution: I . Corrosion Phenomena, Scully, J. R., Frankenthal, R. P., Hanson, K. J., Siconolfi, D. J., Sinclair, J. D.
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Scully et al. (1990) studied this question.