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May 7, 2012Applied Physics Letters

Enhanced sheath heating in capacitively coupled discharges due to non-sinusoidal voltage waveforms

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TLTrevor LafleurUNSW SydneyRBRod BoswellAustralian National UniversityJBJean‐Paul BoothCentre National de la Recherche Scientifique

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Lafleur et al. (2012) studied this question.

synapsesocial.com/papers/6a98570b2c7a731ddbcbd55ehttps://doi.org/10.1063/1.4712128
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