An all optical method designed to test the functionality of nanoelectromechanical systems is presented. Silicon tweezers consisting of freestanding nanometer-sized prongs are prepared using electron beam lithography. Images of the tweezers structures are taken by scanning confocal microscopy while the prongs are electrostatically actuated under a low frequency ac voltage. The images, which are demodulated at the actuation frequency and its higher harmonics, clearly resolve the actuating parts of the tweezers. An actuation amplitude down to 6 pm (rms)/Hz can be detected.
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Meyer et al. (2003) studied this question.
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