Si KαX-ray emission spectra of Si, SiC, SiO2and Si3N4

Si Kalphaspectra from Si, SiC, SiO2and Si3N4have been measured in fluorescence by using a double crystal spectrometer. The chemical shifts, the linewidths as well as relative intensities have been observed for Kalpha 12as well as for Kalphasatellite lines. The measured Kalpha 1X-ray width is 0.43 eV. The chemical environment affects all Kalphalines and this effect is especially strong on the satellite lines. Satellite structure in pure silicon is discussed based on the TOP calculations of Aberg et al. as well as on intermediate coupling.