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April 20, 2007Advanced Materials

Polymer Viscoelasticity and Residual Stress Effects on Nanoimprint Lithography

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YDYifu DingHRH. W. RoJDJack F. Douglas

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Ding et al. (2007) studied this question.

synapsesocial.com/papers/6a98bb3f121d028eeb272206https://doi.org/10.1002/adma.200601998
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