The life of synthetic silica glass under ArF excimer laser irradiation was estimated in relation to the laser energy density by in-situ photoabsorption measurements under exposure to more than 107 shots. Dissolved hydrogen increases the life whereas OH in the glass scarcely influences it. Usual photomask glass is found to be tolerable to more than 1011 shots at 0.1 mJ/cm2 of laser irradiation intensity.
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Shimbo et al. (1999) studied this question.
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