An electron-cyclotron-resonance (ECR) microwave plasma was introduced to the forced oxidation of high-T c Er1Ba2Cu3O y superconducting ceramics in oxygen pressure as low as 0.9 Pa. The negative bias (-40 V) application to the specimen greatly helped the progress of the plasma oxidation as compared with the positive bias (+30 V) one. The accumulation of the oxygen atoms ionized positively is thought to be responsible for the observed bias effect. A higher substance temperature and input microwave power also enhanced the plasma oxidation. A 30-minute oxidation was sufficient to obtain the superconductivity with T c≧92 K.
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Minomo et al. (1988) studied this question.
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