Preparation of Y-Ba-Cu-O Superconducting Thin Films by the Mist Microwave Plasma Decomposition Method

Superconducting thin films of the Y-Ba-Cu-O system were prepared on single crystal MgO(100) substrates by a new technique, the mist microwave plasma decomposition method. The onset and zero resistance temperatures occurred at 85 K and 78 K, respectively, for the as-grown film. The lattice constant c 0 estimated from Bragg angles of (00n) planes was 11.69 Å.