Experimental measurements of coplanar waveguide circuits atop thin films of ferroelectric BaxSr1−xTiO3 (BST) were made as a function of dc bias from 0 to 200 V and frequency from 0.045 to 20 GHz. The resulting phase shifts are compared with method‐of‐moments electromagnetic simulations and a conformal mapping analysis to determine the dielectric constant of the BST films. The accuracy of the resulting dielectric constants is analyzed and compared to low‐frequency measurements of interdigitated capacitor circuits on the same films.
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Keuls et al. (2001) studied this question.
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