Nonlinearity of resistive impurity effects on van der Pauw measurements

The dependence of van der Pauw resistivity measurements on local macroscopic inhomogeneities is shown to be nonlinear. A resistor grid network models a square laminar specimen, enabling the investigation of both positive and negative local perturbations in resistivity. The effect of inhomogeneity is measured both experimentally, for an 11×11 grid, and computationally, for both 11×11 and 101×101 grids. The maximum “shortlike” perturbation produces 3.1±0.2 times the effect predicted by the linear approximation, regardless of its position within the specimen, while all “openlike” perturbations produce a smaller effect than predicted. An empirical nonlinear correction for f(x,y) is presented which provides excellent fit over the entire range of both positive and negative perturbations for the entire specimen.