Numerical study of RF discharge caused by secondary electron emission

A numerical method is presented for studying an RF discharge caused by secondary electron emission from the electrode, i.e. the multipactoring discharge. Using this method, the precise thresholds of the electron multiplication are obtained systematically. Also, this method can be extended to a nonuniform configuration of the electrode and the applied field. For example, the simulation results are compared with typical experimental results in the previous work. Good agreement is obtained for parallel electrodes. Furthermore, an intermediate (subharmonics) mode is found between the usual resonant modes. In the case of the coaxial electrodes, the agreement was obtained when the reflection of low-energy electrons on the surface of the electrode was assumed.