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February 12, 2003Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Characterization of vapor deposited poly (ethylene glycol) films on silicon surfaces for surface modification of microfluidic systems

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Authors

KPKetul C. PopatGeorge Mason UniversityRJRobert W. JohnsonFlorida State UniversityTDTejal A. DesaiJohn Brown University

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Popat et al. (2003) studied this question.

synapsesocial.com/papers/6a9919fc08ab6325d2e12289https://doi.org/10.1116/1.1545733
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