Experimental study demonstrates five-degree-of-freedom motion in a kirigami electrothermal MEMS actuator, indicating suitability for high-precision micromanipulation.
This study experimentally characterizes the 5-DOF motion—out-of-plane (z), in-plane (x, y), and tilt (pitch, roll)— of a kirigami-based electrothermal MEMS actuator for micromanipulation applications. Assuming that a microscale tool is mounted on the top stage, the out-of-plane to in-plane displacement ratio at the tool tip was analytically estimated to be 0.13 based on the measured motion. These results indicate that the actuator can provide in-plane positioning suitable for micromanipulation.
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Matsuoka et al. (2026) studied this question.
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