Titanium is one of the materials exhibiting high coosiomesistancebyfomingaprotcctiveoxide filmInvestigation on the composition and thickness of oxide film is of importancc hl undcrstanding the protective mechanism of the xidefilmechavebeenrcphs1-3)thatthe oxidc film on titanium was analyzed by Xay Photoelectron Spcctroscopy(XPS) but the quantitativc XPS analysis on the composition and filmthicknessoeoxidefilmanodicallyfomed on titanium has scarcely bcen doneIt has bcen confied that thc mixed-valent oxides of h1)coexistthe In this workwe havc uscd the quantitative XPS anaysis to estatc the dlickness of the oxidc film anodically fomed on titaniumandmeasurc the distribution of the multiplc oxidation states of titanium in the film 2EXPERIMENTAL Wolking clectrodcs wcre preparcdom a commcrcially purc titanium shcct containingsome minor impurities(04701Fe3501C51N33 and H18ppm)Specimens were mechanically polished with 20406O and finally 2000 emery paperspotted hl pulc titanium wires (diamcte105mm)
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Shibata et al. (1993) studied this question.
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