Synthesis of well‐defined photoresist materials by SET‐LRP

Single electron transfer‐living radical polymerization (SET‐LRP) provides an excellent tool for the straightforward synthesis of well‐defined macromolecules. Heterogeneous Cu(0)‐ catalysis is employed to synthesize a novel photoresist material with high control over the molecular architecture. Poly(γ‐butyrolactone methacrylate)‐co‐(methyladamantly methacrylate) was synthesized. Kinetic experiments were conducted demonstrating that both monomers, γ‐butyrolactone methacrylate (GBLMA) and methyl adamantly methacrylate (MAMA), are successfully homopolymerized. In both cases polymerization kinetic is of first order and the molecular weights increase linearly with conversion. The choice of a proper solvent was decisive for the SET‐LRP process and organic solvent mixtures were found to be most suitable. Also, the kinetic of the copolymerization of GBLMA and MAMA was investigated. Following first order kinetics in overall monomer consumption and exhibiting a linear relationship between molecular weights and conversion a “living” process was established. This allowed for the straightforward synthesis of well‐defined photoresist polymers.