Actuation Properties of Lead Zirconate Titanate Thick Films Structured on Si Membrane by the Aerosol Deposition Method

The results of the direct deposition of lead zirconate titanate [Pb(Zr0.52, Ti0.48)O3] (PZT) thick film on a Si-based structure are presented. The construction of a bottom electrode is very important for successful deposition. The actuation properties of PZT on the Si membrane were investigated. For a 6.2×6.1 mm2, 65-µm-thick Si membrane driven by a 4.7×4.3 mm2, 13-µm-thick PZT layer, the deflections, which were 1.5 µm upon applying 52 V at nonresonance frequency and 22 µm upon applying 8 V at resonance frequency, were measured.