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We propose and demonstrate a simple and reliable method for fabricating high-quality whispering-gallery mode (WGM) optical microresonators in "mid-IR relevant" low-loss ZrF(4)-BaF(2)-LaF(3)-AlF(3)-NaF (ZBLAN) glasses. Intrinsic quality factors of 10(7) have been demonstrated, providing great promise for WGM-based mid-IR (MIR) devices. Absorption-limited Q-factors of over 3×10(8) are anticipated over the 2.0 to 3.2 μm MIR wavelength range in ZBLAN microcavities in the foreseeable future.
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Way et al. (2012) studied this question.
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