Homogeneous and elongation-free 3D microfabrication by a femtosecond laser pulse and hologram

A new 3D microfabrication method has been developed, which uses only a single femtosecond laser pulse and a hologram. For the microfabrication inside transparent materials, the optical axial elongation of the fabricated structure is a major problem that has thus far limited design flexibility, especially for the direction along the optical axis. By controlling the light intensity distribution profile and using the adequate focal length of the hologram, this problem was solved and homogeneous and elongation-free 3D microfabrication was achieved.