A scanning monochromator system for the monitoring of thin-film deposition in a box coater is described. The system employs data from both a quartz crystal oscillator and a wideband transmission spectrometer. The spectrometer uses a holographic grating as its dispersive element and a CCD array to collect the data. All data are sent to a microcomputer where the information is displayed, stored, and analyzed. Several applications, including measurement of optical constants of inhomogeneous films and characterization of moisture adsorption, are discussed.
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Milligen et al. (1985) studied this question.
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