Two sets of samples of SnO 2 /In 2 O 3 /TiO 2 system have been fabricated with different concentrations of component materials. In the first set TiO 2 with rutile structure was used, while in the second set it has the structure of anatase. Thin films (up to 50 nm) of obtained mixtures were deposited. Their sensitivity and selectivity with respect to methane (CH4) were studied. Nanostructure on the basis of 70%SnO 2 — 10%In 2 O 3 — 20%TiO 2 (anatase) exhibits sufficient sensitivity to methane.
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M. S. Aleksanyan (2010) studied this question.
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