The method of vacuum evaporation deposition of polyterafluoroethylene films under additional vapor activation with an electron cloud and low temperature plasma was described. The film composition, structure, and properties can be controlled by deposition conditions. Co-evaporation with metals and dyes allowed deposition of various composite films. Gold-filled films were modified with thiol for gas sensor applications.
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Konstantin P. Gritsenko (2009) studied this question.
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